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Epitaxy

Epitaxy

by Marian A. Herman, Wolfgang Richter, Helmut Sitter

TechniqueMultilayered Thin filmsEpitaxy
0.0
Open Library
Open Library

About this book

"This advanced textbook describes all important aspects of th epitaxial growth processes of solid films on crystalline substrates, including a section on heteroepitaxy. It covers and discusses in details the most important epitaxial growth techniques, which are currently widely used in basic research as well as in manufacturing processes of devices, namely solid-phase epitaxy, liquid-phase epitaxy, vapor-phase epitaxy, including metal-organic vapor-phase epitaxy and molecular-beam epitaxy. Epitaxy's coverage of science and technology thin-film is intended to fill the need for a comprehensive reference and text examining the variety of problems related to the physical foundations and technical implementation of epitaxial crystallization. It is intended for undergraduate students, PhD students, research scientists, lecturers and practicing engineers interested in materials science, solid state electronics and crystal growth."--Jacket.

Themes & subjects

TechniqueMultilayered Thin filmsEpitaxy

About the author

Helmut Sitter

1951

Authors

Marian A. Herman, Wolfgang Richter, Helmut Sitter

Pages

522

Read time

≈ 13h

Editions

1

Language

English

Publisher

Springer

ISBN

9783540678212

Where to buy

TR
Amazon Bookshop

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