by W. Brian Rowe
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Tribology · Grinding and polishing
Tribology in chemical-mechanical planarization
2005
Grinding and polishing
Grinding machinery
1915
Grinding wheels · Grinding and polishing
Handbook of machining with grinding wheels
2006
Grinding and polishing · Metallographic specimens
Metallographic polishing by mechanical methods
1967
Emery-wheels · Grinding and polishing
Emery grinding machinery
1903
Materials · Chemical mechanical planarization
Microelectronic Applications of Chemical Mechanical Planarization
2007
Tribology of abrasive machining processes
2004
Polishing · Semiconductors
Chemical-mechanical polishing of low dielectric constant polymers and organosilicate glasses
2002
American machinist grinding book
1908
Grinding and polishing · Materials
Chemical mechanical planarization of microelectronic materials
1997
